BS EN ISO 14644-8:2006
Standard Number
BS EN ISO 14644-8:2006
Title
Cleanrooms and associated controlled environmentsClassification of airborne molecular contamination
Status
Revised, Withdrawn
Publication Date
29 September 2006
Withdrawn Date
28 February 2013
Cross References
ISO 14644-6, ISO 14644-4:2001, ISO 14644-5, ISO 14644-7, ISO 14698, JACA 34:2000, JACA 35A:2003, JACA 43:2006, SEMI E108-0301, IEST-RP-CC031.1, IDEMA Standard M11-99, ASTM D5127-99
Replaced By
BS EN ISO 14644-8:2013