AS 14606-2006

AS ISO 14606-2006

Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials Standards Australia / 01-Jan-2006

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Adopts ISO 14606:2000 to give guidance on the optimization of sputter depth profiling parameters using appropriate single-layered and multi-layered reference materials in order to achieve optimum depth resolution as a function of instrument settings.