BS CECC 00013:1985

Describes equipment and procedures to be used for SEM inspection of discrete semiconductor devices and integrated circuits.



Keywords: Electronic equipment and components; Semiconductors ; Semiconductor devices; Integrated circuits; Semiconductor technology; Integrated circuit technology ; Quality assurance systems; Assessed quality; Approval testing; Inspection; Specification (approval) ; Microscopic analysis; Electron microscopes; Non-destructive testing; Test equipment; Testing conditions; Sampling methods; Statistical quality control; Quality control; Specimen preparation

Product Code(s): 00140153,00140153